INSPECTION DEVICE OF STRIPE-SHAPED IRREGULARITY, INSPECTION METHOD OF STRIPE-SHAPED IRREGULARITY, AND MANUFACTURING METHOD OF FILM

摘要

PROBLEM TO BE SOLVED: To provide an inspection device capable of not only discriminating a stripe-shaped defect having a known shape generated on the surface of an inspection object by using an optical procedure but also evaluating quantitatively and highly accurately in a short time a parameter characterizing the shape of the stripe-shaped defect.;SOLUTION: Light having uniqueness to a specific direction is irradiated toward the inspection object, and reflected light or transmitted light from the inspection object generated from the irradiated light is imaged, and the parameter characterizing the shape of the stripe-shaped defect on the surface of the inspection object is determined quantitatively based on an imaging result changing according to inclination of the surface of the inspection object and on a shape model of the stripe-shaped defect on the surface of the inspection object.;COPYRIGHT: (C)2007,JPO&INPIT