SUBSTRATE CONVEYANCE METHOD, RECORDING MEDIUM WITH PROGRAM FOR EXECUTING SUBSTRATE CONVEYANCE METHOD RECORDED THEREIN, AND SUBSTRATE CONVEYANCE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate conveyance method capable of shortening a conveyance time when conveying a laminate formed with two substrates laminated through a spacer member between substrate holding parts.;SOLUTION: The substrate conveyance method for conveying the laminate to the substrate holding part that holds the spacer member when it does not hold the laminate includes: a first step for receiving a first substrate by grabbing the lower part thereof and vertically reversing a second fork 54 to place it on a first fork 53 by a first grabbing mechanism 61 provided on one face 54a side of the second fork 54 provided in the upper part of the first fork 53; a second step for receiving the spacer member held by the substrate holding part by grabbing the upper part thereof to place it on the first substrate by a second grabbing mechanism 62 provided on the same face side as the one face 54a of the second fork 54; and a third step for receiving a second substrate by grabbing the upper part thereof to place it on the spacer member by the first grabbing mechanism 61.;COPYRIGHT: (C)2013,JPO&INPIT