DEVICE FOR ESTIMATING PURITY OF RECOVERED LIQUEFIED SF6 GAS AND METHOD FOR ESTIMATING PURITY OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a device for easily and economically estimating purity of liquid phase SF6 recovered in a gas recovery tank and to provide a method for estimating the purity.SOLUTION: A device 100 for estimating purity includes: input means 1 for inputting measured weight data 11 of SF6 stored in a SF6 recovery tank, measured temperature data 12 and gas phase purity data 13; a database 2 storing diagram correlation 23 obtained from preliminarily measured and obtained gas phase purity data 21 and liquid phase purity data 22 as coordinate axes when the SF6 stored in the SF6 recovery tank is a mixture 56; and computation processing means 3, which computes weights of the gas phase and liquid phase SF6 (56A, 56B) from the measured weight data 11 and the temperature data 12, estimates the purity 26 of the liquid phase SF6 from the gas phase purity data 13 by using the diagram correlation 23 stored about the mixture 56, and computes the purity 27 of the mixture 56 from the estimated purity 26 of the liquid phase SF6 and the measured weight data 11.