CONTENT ESTIMATION DEVICE FOR RECOVERED LIQUEFIED SF6 GAS AND RECOVERED SF6 MIXTURE, AND CONTENT ESTIMATION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a content estimation device capable of easily and economically estimating a purity and a water content of liquid phase SF6 and a SF6 mixture recovered in an SF6 gas recovery tank, and a content estimation method thereof.;SOLUTION: A content estimation device 100 includes input means 1 of receiving the capacity 15 of the SF6 gas recovery tank, measured weight data 11 on stored SF6 in the tank, vapor-phase steam pressure data 12, vapor-phase purity data 13, and vapor-phase water amount data 14; a database 2 which stores previously acquired correlations 23, 63 of purities and water amounts of vapor-phase and liquid-phase SF6 stored in the SF6 gas recovery tank; and arithmetic processing means 3 of computing concentrations and volumes of the vapor-phase and liquid-phase SF6 from the data 11, 12, and 15, computing a purity 26 and a water amount 66 of the liquid-phase SF6 from the data 13, 14 using the correlations 23, 63, and computing a purity 27 and a water amount 67 of a mixture 56 from the respective computed concentrations and volumes.;COPYRIGHT: (C)2013,JPO&INPIT