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WORKPIECE DIMENSION MEASURING APPARATUS AND WORKPIECE DIMENSION MEASURING METHOD

机译:工件尺寸测量装置和工件尺寸测量方法

摘要

PROBLEM TO BE SOLVED: To provide a workpiece dimension measuring apparatus and a workpiece dimensional measuring method capable of achieving reduction of operation costs from dimension measurement up to preparation of inspection records after measurement and shortening the operation time while achieving improvement of measuring accuracy, and capable of obtaining also three-dimensional data of flatness, distortion, and so on.;SOLUTION: A workpiece dimension measuring apparatus 1 for measuring the dimensions of a segment W includes: a plurality of measuring instruments 10 each of which includes a multi-joint arm 12 and is capable of obtaining three-dimensional coordinate values by bringing a probe 11 attached to the tip of the arm 12 into contact with the segment W; calibration operation means 21 for performing operation for calibrating a relative position relation between the measuring instruments 10 and operation for automatically calculating the dimensions of the segment W based on respective three-dimensional coordinate values obtained by the plurality of measuring instruments 10; measurement evaluation means 22 for evaluating the dimension measurement results of the segment W based on the calibration result and the operation result from the calibration operation means 21; and data management means 31 for collecting the measurement results from the measurement evaluation means 22 as an inspection record and outputting the inspection record.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:提供一种能够减小从尺寸测量到测量后准备检查记录的作业成本,并且能够在提高测量精度的同时缩短作业时间的工件尺寸测量装置和工件尺寸测量方法。解决平面度,变形等的三维数据的方法。解决方案:用于测量段W的尺寸的工件尺寸测量装置1包括:多个测量仪器10,每个测量仪器包括多关节臂。如图12所示,通过使安装在臂12的前端的探针11与线段W接触,能够获得三维坐标值。校准操作装置21,用于执行校准测量仪器10之间的相对位置关系的操作和用于基于由多个测量仪器10获得的各个三维坐标值自动计算段W的尺寸的操作;测量评估装置22,用于基于校准结果和来自校准操作装置21的操作结果评估段W的尺寸测量结果;数据管理装置31,用于从测量评估装置22收集测量结果作为检查记录并输出检查记录。COPYRIGHT:(C)2012,JPO&INPIT

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