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POSITION DETECTING DEVICE, POSITION DETECTING METHOD, MICHELSON INTERFEROMETER, AND FOURIER TRANSFORM SPECTROSCOPIC ANALYZER
POSITION DETECTING DEVICE, POSITION DETECTING METHOD, MICHELSON INTERFEROMETER, AND FOURIER TRANSFORM SPECTROSCOPIC ANALYZER
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机译:位置检测装置,位置检测方法,MICHELSON干涉仪和傅里叶变换光谱分析仪
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摘要
PROBLEM TO BE SOLVED: To provide a position detecting device consisting of a simple configuration.;SOLUTION: A position detecting device 70 for detecting a position of a leaf spring 41 (a measuring object) moving in a prescribed moving direction (an arrow AR) includes: a light receiving section 72A; and a light projecting section 71A facing the light receiving section 72A and projecting measuring light 80 to the light receiving section 72A. The light receiving section 72A and the light projecting section 71A are disposed such that the measuring light 80 obliquely crosses with the moving direction (the arrow AR) of the leaf spring 41 that moves between the light receiving section 72A and the light projecting section 71A. With the movement of the leaf spring 41, a part of the measuring light 80 is blocked by the leaf spring 41 and the residual light of the measuring light 80 reaches the light receiving section 72A. The position of the leaf spring 41 can be thus detected based on the quantity of the residual light of the measuring light 80 received by the light receiving section 72A.;COPYRIGHT: (C)2012,JPO&INPIT
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