Vacuum ultraviolet mask, patterning device manufacturing apparatus according to a manufacturing method and a vacuum ultraviolet light patterned product by vacuum ultraviolet light

摘要

PPROBLEM TO BE SOLVED: To provide a metal mask for vacuum-ultraviolet light, by which a pattern-formed body can be manufactured with high sensitivity, wherein the pattern-formed body is accurately subjected to vacuum-ultraviolet light radiation by using the vacuum-ultraviolet light in a high-definition and complex pattern. PSOLUTION: The metal mask 10 for vacuum-ultraviolet light is used for the method of manufacturing the pattern-formed body whose pattern-forming surface is subjected to the vacuum-ultraviolet light radiation in a pattern by: using a substrate for forming the pattern; arranging the metal mask on the pattern-forming surface of the substrate for forming the pattern; and irradiating the pattern-forming surface with the vacuum-ultraviolet light through the metal mask in the presence of a reactant gas. The metal mask includes: a metal mask body 1 consisting of a metal thin plate and having an opening 2; and a bridge portion 3 formed to form a bridge across the opening, wherein the bridge portion is formed so that an air gap through which the reactant gas can be passed is formed between the pattern-forming surface and the bridge portion when the bridge portion is arranged on the substrate 101 for forming the pattern. PCOPYRIGHT: (C)2010,JPO&INPIT