DEFECT INSPECTION DEVICE FOR TRANSPARENT SUBSTRATE AND DEFECT INSPECTION METHOD FOR PARENT SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a defect inspection device capable of non-destructively and high-accurately inspecting a defect of a transparent substrate without using an expensive evaluation equipment or a microscope.;SOLUTION: A defect inspection device for a transparent substrate having an off angle comprises at least a light source, a light receiver including a solid-state imaging device for measuring a transmitted beam which has been transmitted through the transparent substrate, two polarizing plates, a sample stage for placing the transparent substrate, and a tilt mechanism for tilting the sample stage and the two polarizing plates to the light receiver by corresponding to the off angle of the transparent substrate. One of the two polarizing plates is arranged between the light source and the sample stage and the other is arranged between the sample stage and the light receiver so that at least one of the polarizing plates is parallel to the sample stage, and also the two polarizing plates are arranged so that the deviation from the transmission axis is within 30 degrees.;COPYRIGHT: (C)2012,JPO&INPIT