DYNAMICAL QUANTITY SENSOR AND METHOD FOR MANUFACTURING DYNAMICAL QUANTITY SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a dynamical quantity sensor capable of detecting the magnitude and direction of external force, and acceleration and to provide a method for manufacturing the dynamical quantity sensor at lower cost.;SOLUTION: The dynamical quantity sensor according to one embodiment of the present invention comprises: a substrate; a plurality of fixing parts disposed on the substrate; a plurality of movable electrodes disposed so as to have each of end parts supported on the plurality of fixing parts, to segregate from the substrate and to respectively have a predetermined interval; a fixed electrode disposed in the direction of detecting a dynamic quantity adjacent respectively to the other end parts of the plurality of movable electrodes; a plurality of first terminals respectively electrically connected to the plurality of fixing parts; and a second terminal electrically connected to the fixed electrode.;COPYRIGHT: (C)2012,JPO&INPIT