MEMS DYNAMIC PRESSURE SENSOR TO BE APPLIED ESPECIALLY TO MICROPHONE MANUFACTURING

摘要

PROBLEM TO BE SOLVED: To discover a MEMS type new sensor or a microsensor structure, or a MEMS type dynamic sensor having no defect and restriction which may be included in the MEMS type new sensor, and to discover a new method embodiment corresponding to such structure.;SOLUTION: The MEMS and/or NEMS type pressure sensor is disclosed. The pressure sensor includes: an at least one deformable cavity (20) for receiving atmospheric pressure variation, which is formed in a first substrate and includes at least one movable or deformable wall (25) at least partially arranged in a plane, called as a plate of the sensor, parallel with the first substrate and a means (21) for transmitting the atmospheric pressure variation to the cavity; and detection means (24, 24') for detecting the displacement or deformation of the movable or deformable wall (25) in the plane of the sensor under the influence of the atmospheric pressure variation.;COPYRIGHT: (C)2012,JPO&INPIT