A method of forming a recess structure utilizing the River Stone processing

摘要

The present invention provides a method of forming a recessed portion on a substrate, the method comprising the steps of forming on a substrate a patterned layer having a Fu~yucha first, a shape are trim etching the Fu~yucha first including forming a trim Futuresse, and a step of transferring the substrate to reverse shape of the shape. [Selection Figure Figure 4