CONFOCAL SCANNING TRANSMISSION TYPE ELECTRON MICROSCOPE DEVICE AND THREE-DIMENSIONAL TOMOGRAPHIC OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a confocal scanning transmission type electron microscope device and a three-dimensional tomographic observation method such that atom arrays of a thin-layer sample at different depths are observed through one image.;SOLUTION: The confocal scanning transmission type electron microscope device includes an electron source which emits an electron, means of accelerating the electron emitted from the electron source, a converging lens which converges the accelerated electron beam on the sample, a scanning coil for scanning a sample surface with the electron beam, an objective for focusing on the sample surface, a projection lens for controlling a taking-in angle of the electron beam scattered by the sample, a scanning microscope image detector for acquiring a scanning microscope image, an analysis device which analyzes the composition of the sample and an electron state, a measurement part for measuring a sample thickness, and focal depth adjustment means of adjusting the focal depth of the objective, and is provided with a spherical aberration correction device which corrects a spherical aberration of the objective, and a chromatic aberration correction device which corrects and adjusts a chromatic aberration in front of the objective, and also provided with a control part which adjusts a chromatic aberration coefficient of the objective and a measurement part which measures the chromatic aberration coefficient.;COPYRIGHT: (C)2012,JPO&INPIT