Foreign material method of detection, being the foreign material method of detection which detects the foreign material which comes in contact with

摘要

PURPOSE: A foreign material detecting method, a foreign material detecting device, a foreign material detecting system, and a storage medium are provided to perform a foreign material detection and a component analysis on the same substrate. CONSTITUTION: A foreign material detecting method is as follows. The moisture around foreign materials is selectively condensed by controlling vapor pressure surrounding a substrate. Ice crystals are generated from the condensed moisture by controlling a saturated vapor pressure curve when the foreign materials are not attached to the surface of the substrate. The surface of the substrate is optically inspected. The temperature of the substrate falls and the saturated vapor pressure, when the foreign materials are not attached on the surface of the substrate, is controlled to produce the vapor pressure.