OXYGEN DETECTING GAUGE, IONIZATION GAUGE WITH OXYGEN DETECTING FUNCTION, AND MASS SPECTROMETER

摘要

PROBLEM TO BE SOLVED: To provide an oxygen detecting gauge that can cause oxygen to be practically quickly desorbed when a large quantity of oxygen is adsorbed in a filament surface.;SOLUTION: An oxygen detecting gauge M1 that is fitted to a vacuum vessel W and detects oxygen therein is provided with a metallic filament 1 whose surface is covered with an oxide film, a grid 2, and a variable power source E1 for the filament for causing a DC current to flow to the filament. The filament is supplied with power from the variable power source so that an emission current between the filament and the grid is kept at a predetermined value to cause the filament to be lit so as to emit thermal electrons. The present oxygen is detected from a value of the current flowing on the filament. The gauge is further provided with electricity applying means E3 and SWf that can apply a larger current than the filament current to the filament at the time the emission current reaches a predetermined value.;COPYRIGHT: (C)2012,JPO&INPIT