The organic matter, and/or, evaporation manner of the compound thin film of the organic matter and the inorganics where the inorganics are the poly components and the evaporation

摘要

PROBLEM TO BE SOLVED: To provide a device for depositing an organic/inorganic thin film and a deposition method thereof capable of manufacturing and commercializing an organic/inorganic thin film of high quality.;SOLUTION: The method and the device for depositing an organic/inorganic thin film in a time-division manner include a source vessel containing organic/inorganic materials, and a catalyst source vessel containing a heat initiator for activating the materials so that the thickness of the organic/inorganic thin film can be accurately adjusted, and the deposition can be uniformly performed when the thin film is deposited on a large-scale substrate. Also, the thickness and composition of organic/inorganic thin films can be accurately adjusted when at least one organic/inorganic thin film is deposited.;COPYRIGHT: (C)2008,JPO&INPIT