Evaporation manner of the vapor phase organic matter in the evaporation device null vapor phase organic matter evaporation device

摘要

PROBLEM TO BE SOLVED: To make fine adjustment of the mixing amount of organic materials by uniformly depositing a vapor-phase organic matter by evaporation on a substrate having a wide area and depositing an organic thin film at a high speed thereon.;SOLUTION: A vapor deposition system includes a jetting section 110 provided with a base material stabilizing section 140 for stabilizing a base material 10 used for depositing the vapor-phase organic matter by evaporation in its internal space and jets the vapor-phase organic matter in the direction of the stabilizing section, a vapor deposition chamber 100 including one or more heat insulating heaters 130, one or more carrier gas lead-in holes formed to a hole shape so as to lead in the carrier gas for carrying the vapor-phase organic matter, and one or more lead-out holes formed to a hole shape so as to lead out the organic matter vapor and the carrier gas. The system includes a crucible 220 capable of storing the organic matter, one or more organic matter chambers 200 internally including organic matter heaters for heating the inside of the crucible, a flow rate control section 400 for controlling the amount of the carrier gas to be led into the organic matter chambers and the velocity of flow thereof, a transfer pipe 210 for the vapor-phase organic matter in which the organic matter in the organic matter chambers can move to the jetting section and a vacuum pump 150.;COPYRIGHT: (C)2004,JPO