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Being kiyapirari for energy grant in order to grant the energy by the charged particle kiyapirari for energy grant
Being kiyapirari for energy grant in order to grant the energy by the charged particle kiyapirari for energy grant
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机译:成为kiyapirari进行能量授予,以便通过带电粒子kiyapirari授予能量
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摘要
PROBLEM TO BE SOLVED: To provide an energy transfer capillary which performs an energy transfer by charged particles in a three-dimensional manner more precisely.;SOLUTION: The energy transfer capillary 1 for transferring energy by charged particles to a target is equipped with a main body part 3 of the capillary which is surrounded by cylindrical side walls and has a hollow part where the charged particles pass through in the direction of the axis of the capillary and a lid body part 2 for closing an open end of the hollow part at an end part of the main body part of the capillary. The hollow part 4 formed as a closed space in the main body part 3 by the lid body part 2 is kept in a vacuum state, and the thickness of the lid body part 2 is determined in a manner to perform the energy transfer by charged particles to the target in a region to a position at a prescribed distance from the outer surface of the lid body part.;COPYRIGHT: (C)2008,JPO&INPIT
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