Electron spectroscopy composite device, and electron spectroscopy methods

摘要

PPROBLEM TO BE SOLVED: To provide an electron spectrometer and an electron spectroscopy method for easily obtaining accurate information on an electron structure and a local structure of the chemical species for forming a surface or an interface of a single-layer or multi-layer solid sample. PSOLUTION: The electron spectrometer is provided with: a vacuum vessel 11; a sample holding section 13a for holding the sample 12 within the vacuum vessel 11; an X ray source 31 disposed in a position of the vacuum vessel 11 in which a measurement point 12b of the sample 12 is viewed, and irradiating the measurement point 12b with X rays; an ultraviolet ray source 32 for irradiating it with ultraviolet rays; a plurality of electron beam sources 33 for irradiating electron beams; and an electron energy analyzer 40 for detecting photoelectrons emitted from the sample 12 by irradiating it with the X rays, the ultraviolet rays or the electron beams, or electrons scattered by the sample 12. A plurality of the electron beam sources 33, 33, ... are disposed so as to cause incident angles of the electron beams to be different relative to a sample surface 12a. PCOPYRIGHT: (C)2009,JPO&INPIT