The restoration process restoration the paste which makes the sheet

摘要

PROBLEM TO BE SOLVED: To provide a method for inspecting via holes and wiring arranged on the surface and in the inner part of a substrate and a conductive paste filling state, in a substrate whose via holes are filled with a conductive paste, at low cost.;SOLUTION: An inspection method includes a process for making one surface of the substrate tightly contact a heating or cooling mechanism so as to heat or cool the surface; and a process for detecting the temperature of an electrode on a second surface which is different from the heated or cooled first surface so as to determine whether a part between the electrodes arranged on both the connection surfaces is connected normally, based on the detected temperature. An inspection device of the method is also provided.;COPYRIGHT: (C)2008,JPO&INPIT