Vacuum chamber device, electrostatic latent image formation device and electrostatic latent image measurement equipment

摘要

PPROBLEM TO BE SOLVED: To provide an electrostatic latent image forming apparatus and an electrostatic latent image measuring apparatus which facilitate mounting/removing a vacuum stage unit in/from a vacuum chamber and are capable of measuring an electrostatic latent image within a short time after latent image formation. PSOLUTION: A vacuum chamber device is provided with a specimen support unit 60 which is capable of moving a sample 30 held thereon, in an arbitrary direction within a vacuum chamber 50. A placing base 55 and a guide rail 52 for guiding movement of the placing base 55 are installed on an outer wall portion of the vacuum chamber 50, and a vacuum specimen support unit 60 comprising a flange 61, a stage part 62, a stage driving part 63, and a box-type structure 69 is mounted on the placing base 55, and the vacuum specimen support unit 60 is provided with a positioning member 65 for positioning in at least two directions. PCOPYRIGHT: (C)2007,JPO&INPIT