image display method of the laser illumination apparatus, illumination method, a method of manufacturing a semiconductor device, a projection display device, and using a projection display device

摘要

I get a laser lighting device that provides the light intensity distribution of a uniform illumination light beam with high brightness. A light source unit 8 multiple is arranged in the plane of the nonlinear material 7 and the laser medium 5 with a waveguide structure formed in a plate shape and the semiconductor laser 1, the continuous wave waveguide mode of the laser medium 5, the plurality of plurality of light source modules which have been propagated through the light source modules 20 each having an optical system 12 of the first coupling the laser oscillation light from the light source unit 8, the optical fiber array 14 and the second 13 optical fibers of the first a homogenization element 16 of the optical system 15 of the second to couple the laser beam 20, which converts the laser beam is uniform laser beam from the optical system 15 in the second, through a homogenizing element 16 and an optical system 17 of the third to the illuminating light beam 11 is projected to be at a predetermined magnification on the substrate 19 is illuminated surface 18 the laser beam uniform.