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Laser illumination device, illumination method, semiconductor element manufacturing method, projection display device, and image display method using the projection display device

机译:激光照明装置,照明方法,半导体元件的制造方法,投影显示装置以及使用该投影显示装置的图像显示方法

摘要

A laser illumination device for providing a light intensity distribution of a high-intensity and uniform illumination light flux is obtained. The device includes a plurality of light source modules (20) each including: a plurality of light source units (8), in each of which a semiconductor laser (1), and a laser medium (5) and a nonlinear material (7) which are flat-shaped and have a waveguide structure are arranged on the same plane, for performing continuous oscillation in a waveguide mode of the laser medium (5); and a first optical system (12) for coupling laser oscillation beams from the plurality of light source units (8). The device further includes: a second optical system (15) for coupling laser light beams propagating from the plurality of light source modules (20) through first optical fibers (13) and a second optical fiber array (14); a uniformization element (16) for converting a laser light beam from the second optical system (15) into a uniform laser light beam; and a third optical system (17) for projecting, to a substrate (19) which is an illuminated surface (18), the uniform laser light beam obtained through the uniformization element (16) at a predetermined magnification, to produce an illumination light flux (11).
机译:获得了用于提供高强度的光强度分布和均匀的照明光束的激光照明装置。该设备包括多个光源模块( 20 ),每个光源模块包括:多个光源单元( 8 ),每个光源单元中均具有半导体激光器( 1 ),并在其上排列有扁平形状并具有波导结构的激光介质( 5 )和非线性材料( 7 )平面,用于在激光介质( 5 )的波导模式下进行连续振荡;第一光学系统( 12 )用于耦合来自多个光源单元( 8 )的激光振荡光束。该设备还包括:第二光学系统( 15 ),用于通过第一光纤()耦合从多个光源模块( 20 )传播的激光束。 13 )和第二个光纤阵列( 14 );均匀化元件( 16 ),用于将来自第二光学系统( 15 )的激光束转换成均匀的激光束;第三光学系统( 17 ),用于将均匀激光投射到作为照明表面( 18 )的基板( 19 )上光束以预定的倍率通过均匀化元件( 16 )获得,以产生照明光束( 11 )。

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