Discharge amount control method, discharge pressure control method, injection device, method for manufacturing microscopic object, discharge amount control device, and discharge amount control program

摘要

A second valve is opened to combine an injection-pressure generating pressure with a maintaining pressure into an injection pressure. After the injection pressure is applied to a capillary (9) to cause discharge of an object therefrom, an output pressure of a regulator (3) is set to the injection pressure. Then, a first valve is opened to reapply the injection pressure to the capillary (9). The second valve is opened to combine a maintaining-pressure generating pressure with the injection pressure into the maintaining pressure. After the maintaining pressure is applied to the capillary (9) to terminate the discharge of the object, the output pressure of the regulator (3) is set to the maintaining pressure. Then, the first valve is opened to reapply the maintaining pressure to the capillary (9).