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In the direction which is the nano- wire production method of grain growth nano- wire

机译:方向是晶粒长大纳米线的纳米线生产方法

摘要

PROBLEM TO BE SOLVED: To provide a method for producing nanowires, by which single crystal nanowires maintaining a crystal state of a crystal substrate and free of defects can be grown.;SOLUTION: The formation of side facet necessary for free-standing nanowire is made unstable and the growth of a nanowire in a direction parallel to the surface of a crystal substrate and along the surface is made possible by growing the nanowire under growth conditions purposefully shifted from the relatively narrow range of growth conditions allowing the growth of the free-standing nanowire. Alternatively, it is possible to continuously arrange an n-type InP-nanowire 3n and a p-type InP nanowire 3p by switching, for example, the dopant on the way of growth of the nanowire, and further, a net-like semiconductor film can be obtained by crossing a plurality of parallel nanowires.;COPYRIGHT: (C)2010,JPO&INPIT
机译:要解决的问题:提供一种生产纳米线的方法,通过该方法可以生长保持晶体基板晶体状态且无缺陷的单晶纳米线。;解决方案:形成了独立纳米线所需的侧面通过在有意偏离相对较窄范围的生长条件的生长条件下生长纳米线,使纳米线在平行于晶体基板表面的方向上以及沿着该表面的方向生长成为可能,从而实现独立式生长。纳米线。可替代地,可以通过例如在纳米线的生长途中切换掺杂剂,并且进一步地,网状半导体膜来连续地布置n型InP纳米线3n和p型InP纳米线3p。可以通过交叉多个平行的纳米线获得。版权所有:(C)2010,JPO&INPIT

著录项

  • 公开/公告号JP4923003B2

    专利类型

  • 公开/公告日2012-04-25

    原文格式PDF

  • 申请/专利权人 日本電信電話株式会社;

    申请/专利号JP20080186474

  • 发明设计人 舘野 功太;章 国強;

    申请日2008-07-17

  • 分类号C30B29/62;C30B29/40;H01L29/06;C01B25/08;

  • 国家 JP

  • 入库时间 2022-08-21 17:37:05

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