Ultrasonic transducer made by micromachining process, the ultrasonic transducer unit and the cavity in the ultrasonic diagnostic apparatus, and control method

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic vibrator combining cMUT and pMUT.;SOLUTION: The ultrasonic vibrator manufactured by the micro-machining process comprises a first electrode in which a control signal for transmitting ultrasonic waves is input, a substrate in which the first electrode is formed, a second electrode which is a grounded electrode facing the first electrode with prescribed space in-between, a membrane on which the second electrode is layered to vibrate as the voltage is applied between the first and second electrodes to generate ultrasonic waves, a piezoelectric membrane in contact with the membrane, and a third electrode conducting to the piezoelectric membrane.;COPYRIGHT: (C)2007,JPO&INPIT