Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance

摘要

This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PMUT had the advantages that (1) it had an ultra-high ultrasonic emission power output and (2) it achieved much higher emission performance when working in array mode due to its reduced cross talk characteristics. Two different dimensions were presented for the proposed PMUT with the work frequencies of 9.8MHz and 6.3MHz, respectively. And the emission sensitivity of proposed PMUT shown a remarkable increase compared with the traditional circular PMUT in water.