Two-dimensional position detection method of radiation using the same and semiconductor detector to detect a two-dimensional position of the radiation

摘要

2-dimensional position detector 1 semiconductor for detecting a two-dimensional position of the radiation were juxtaposed at a predetermined interval in the X-direction surface of the semiconductor substrate (2), a semiconductor substrate (2) and (2A), (n is an integer of 2 or more) from the Schottky diode, and a (15) electrodes were formed on the back stripe electrode (3), a semiconductor substrate (2) and (2B) first through n-th parallel to the Y-direction The result, it is possible to connect in sequence each via (4, 5) resistance to both end portions between the stripe electrodes (3), from the ends of (3) stripe electrodes of the n first and which is disposed at both ends, the semiconductor I extracting signals output signal _V 1 ~V ₄ radiation from (16) that is incident on the substrate (2).