Phase object detection apparatus and phase object detection method

摘要

PROBLEM TO BE SOLVED: To detect a phase object in an image by simple device constitution.;SOLUTION: The phase object detecting device is equipped with: a light source comprising a parallel light source or a point light source; an optical system to condense light emitted from the light source and transmitted through a sample; an imaging device to generate image data based on the light condensed by the optical system; a driving device to change the relative position of the sample to the focus of the optical system at least in an optical axis direction; and a controller. The controller sets image data obtained by arranging the focus between the sample and the optical system by controlling the driving device as front focus image data, and image data obtained by arranging the sample between the focus and the optical system by controlling the driving device as rear focus image data, so that the phase object is detected by using the front focus image data and the rear focus image data.;COPYRIGHT: (C)2007,JPO&INPIT