The work measurement inspecting system and work measurement inspection manner

摘要

PROBLEM TO BE SOLVED: To provide a system and method of measuring and inspecting workpieces, capable of accurately measuring electrical characteristics of workpieces, facilitating probe adjustment, suppressing halation on electrodes due to light applied to workpieces for visual inspection of work pieces, and thus assuring the visual inspection of workpieces.;SOLUTION: A light transmittable member 7 is provided on the cover mechanism 6. In measurement of electric characteristics of a workpiece W, probes 13a and 13b move to the light transmittable member 7 until a workpiece W on the probes 13a and 13b abuts on the lower surface 7a of the light transmittable member 7. A measuring instrument 21 measures the electrical characteristics of the workpiece W abutting on the lower surface 7a of the light transmittable member 7 through the probes 13a and 13b. Further, the lower surface 7a of the light transmittable member 7 is rough.;COPYRIGHT: (C)2009,JPO&INPIT