Film thickness evaluation apparatus and film thickness evaluation method

摘要

Electrostatic force acting between the probe and the sample while scanning the probe on the sample surface to provide a film thickness evaluation device that can evaluate the film thickness distribution of the insulator layer formed on the conductor surface with high resolution The film thickness is mapped by obtaining the absolute value of the film thickness from the square root of the reciprocal of the twice differential signal related to the voltage and the differential signal related to the probe-sample distance.