BULK ACOUSTIC WAVE RESONATOR AND BULK ACOUSTIC WAVE FILTER AND METHOD OF FABRICATING BULK ACOUSTIC WAVE RESONATOR

摘要

A bulk acoustic wave (BAW) resonator includes a substrate, and two electrodes stacked on the substrate, and at least one piezoelectric layer interposed between the two electrodes. The two electrodes and the piezoelectric layer are at least partially overlapped with each other in a vertical projection direction, and one of the two electrodes has a plurality of openings.