ACTUATOR, PROTECTIVE COVER FOR ACTUATOR, ACTUATOR MANUFACTURING METHOD, AND OPTICAL DEFLECTOR INCORPORATING ACTUATOR, AND TWO DIMENSIONAL OPTICAL SCANNER AND IMAGE PROJECTOR INCORPORATING OPTICAL SCANNER

摘要

An actuator is configured of a frame element, a pair of beam elements, a movable element rotatably supported by the frame element via the beam elements, a driver configured to rotate the movable element relative to the frame element around the beam elements as a rotary shaft; and damper elements provided on the rotary axis of the beam elements.