Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner

摘要

An actuator (30) is configured of a frame element (1), a pair of beam elements (3), a movable element (2) rotatably supported by the frame element (1) via the beam elements (3), a driver configured to rotate the movable element (2) relative to the frame element (1) around the beam elements (3) as a rotary shaft; and damper elements (4) provided on the rotary axis (O) of the beam elements (3).