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ULTRA-MINIATURE FIBER-OPTIC PRESSURE SENSOR SYSTEM AND METHOD OF FABRICATION

机译:超小型光纤压力传感器系统及制造方法

摘要

Ultra-miniature surface-mountable optical pressure sensor is constructed on an optical fiber. The sensor design utilizes an angled fiber tip which steers the optical axis of the optic fiber by 90°. The optical cavity is formed on the sidewall of the optic fiber. The optical cavity may be covered with a polymer-metal composite diaphragm to operate as a pressure transducer. Alternatively, a polymer-filled cavity may be constructed which does not need a reflective diaphragm. The sensor exhibits a sufficient linearity over the broad pressure range with a high sensitivity. The sensitivity of the sensor may be tuned by controlling the thickness of the diaphragm. Methods of batch production of uniform device-to-device optical pressure sensors of co-axial and cross-axial configurations are presented.
机译:可在光纤上构建超小型表面安装式光学压力传感器。传感器设计采用了倾斜的光纤头,可将光纤的光轴转向90°。光学腔形成在光纤的侧壁上。光学腔可以覆盖有聚合物-金属复合膜片以用作压力传感器。可替代地,可以构造不需要反射膜片的填充聚合物的腔。该传感器在宽压力范围内显示出足够的线性度,并且灵敏度很高。传感器的灵敏度可以通过控制隔膜的厚度来调节。提出了批量生产同轴和交叉轴配置的统一设备间光学压力传感器的方法。

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