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Thin Film of Solar Battery Structure, Thin Film of Solar Array and Manufacturing Method Thereof

机译:太阳能电池结构薄膜,太阳能电池阵列薄膜及其制造方法

摘要

The present invention proposes a thin-film solar cell structure, a method for manufacturing the same and a thin-film solar cell array. The method for manufacturing thin-film solar cell structures comprises: forming at least two first trenches through a first surface into said semiconductor substrate, forming at least one second trench through a second surface into said semiconductor substrate, said second trench located between two neighboring said first trenches; forming a first structure on sidewalls of each of said first trenches; to forming a second structure on sidewalls of each of said second trench; and cutting or stretching said semiconductor substrate to form thin-film solar cell structures. The distance between the electrodes can be effectively shortened through the present invention such that the recombination rate between the electrons and the holes can be reduced and the bulk recombination current and the surface recombination current can be reduced to achieve the objective of improving power generation efficiency. The thin-film solar cell structure and the method for manufacturing the same proposed in the present invention can also save semiconductor material and reduce production cost.
机译:本发明提出了一种薄膜太阳能电池结构,其制造方法以及薄膜太阳能电池阵列。用于制造薄膜太阳能电池结构的方法包括:形成至少两个穿过第一表面进入所述半导体衬底的第一沟槽;形成至少一个穿过第二表面进入所述半导体衬底的第二沟槽,所述第二沟槽位于两个相邻的所述沟槽之间。第一条战;;在每个所述第一沟槽的侧壁上形成第一结构;在每个所述第二沟槽的侧壁上形成第二结构;切割或拉伸所述半导体衬底以形成薄膜太阳能电池结构。通过本发明,可以有效地缩短电极之间的距离,从而可以减小电子与空穴之间的复合率,并且可以减小体复合电流和表面复合电流,从而达到提高发电效率的目的。本发明提出的薄膜太阳能电池结构及其制造方法还可以节省半导体材料并降低生产成本。

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