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METAL AND SEMIMETAL SENSORS NEAR THE METAL INSULATOR TRANSITION REGIME
METAL AND SEMIMETAL SENSORS NEAR THE METAL INSULATOR TRANSITION REGIME
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机译:金属绝缘子过渡区附近的金属和半金属传感器
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摘要
This invention generally relates to sensors made of granular thin films in the discontinuous phase. More particularly, the invention relates to microbolometers and displacement sensors fabricated from thin films that are close to the metal insulator transition (MIT) or metal semiconductor transition (MST) regime. Sensors of various designs have been fabricated according to the invention and may be used for deflection measurements, nano-indentation, visco-elastic measurements, topographical scanning, explosive detection, low abundance biomolecular detection, electromagnetic radiation detection and other similar detection and measurement systems.
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