LATERAL EXTENDED DRAIN METAL OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTOR (LEDMOSFET) HAVING A HIGH DRAIN-TO-BODY BREAKDOWN VOLTAGE (Vb), A METHOD OF FORMING AN LEDMOSFET, AND A SILICON-CONTROLLED RECTIFIER (SCR) INCORPORATING A COMPLEMENTARY PAIR OF LEDMOSFETS

摘要

Disclosed are embodiments of a lateral, extended drain, metal oxide semiconductor, field effect transistor (LEDMOSFET) having a high drain-to-body breakdown voltage. Discrete conductive field (CF) plates are adjacent to opposing sides of the drain drift region, each having an angled sidewall such that the area between the drain drift region and the CF plate has a continuously increasing width along the length of the drain drift region from the channel region to the drain region. The CF plates can comprise polysilicon or metal structures or dopant implant regions within the same semiconductor body as the drain drift region. The areas between the CF plates and the drain drift region can comprise tapered dielectric regions or, alternatively, tapered depletion regions within the same semiconductor body as the drain drift region. Also disclosed are embodiments of a method for forming an LEDMOSFET and embodiments of a silicon-controlled rectifier (SCR) incorporating such LEDMOSFETs.