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PATTERN-SPLIT DECOMPOSITION STRATEGY FOR DOUBLE-PATTERNED LITHOGRAPHY PROCESS
PATTERN-SPLIT DECOMPOSITION STRATEGY FOR DOUBLE-PATTERNED LITHOGRAPHY PROCESS
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机译:双面平版印刷工艺中的图案分割分解策略
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摘要
An integrated circuit may be formed by a process of forming a first interconnect pattern in a plurality of parallel route tracks, and forming a second interconnect pattern in the plurality of parallel route tracks. The first interconnect pattern includes a first lead pattern which extends to a first point in an instance of the first plurality of parallel route tracks, and the second interconnect pattern includes a second lead pattern which extends to a second point in the same instance of the plurality of parallel route tracks, such that the second point is laterally separated from the first point by a distance one to one and one-half times a space between adjacent parallel lead patterns in the plurality of parallel route tracks. A metal interconnect formation process is performed which forms metal interconnect lines in an interconnect level defined by the first interconnect pattern and the second interconnect pattern.
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