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AlGaInN-based lasers produced using etched facet technology
AlGaInN-based lasers produced using etched facet technology
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机译:使用蚀刻刻面技术生产的基于AlGaInN的激光器
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摘要
A process for fabricating AlGaInN-based photonic devices, such as lasers, capable of emitting blue light employs dry etching to form device waveguides and mirrors. The dry etching is preferably performed using a Chemically Assisted Ion Beam Etching (CAIBE) system.
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