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THIN FILM DEPOSITION APPARATUS, ORGANIC LIGHT-EMITTING DISPLAY MANUFACTURED BY USING THIN FILM DEPOSITION APPARATUS, AND METHOD OF MANUFACTURING THE ORGANIC LIGHT-EMITTING DISPLAY
THIN FILM DEPOSITION APPARATUS, ORGANIC LIGHT-EMITTING DISPLAY MANUFACTURED BY USING THIN FILM DEPOSITION APPARATUS, AND METHOD OF MANUFACTURING THE ORGANIC LIGHT-EMITTING DISPLAY
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机译:薄膜沉积设备,通过使用薄膜沉积设备制造的有机发光显示器以及制造有机发光显示器的方法
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摘要
A thin film deposition apparatus, which has high external light transmittance and a cathode having a uniform thickness, is disclosed. In one embodiment, the thin film deposition apparatus includes a deposition source spaced apart from a center of the substrate and configured to emit a deposition material toward the substrate and a blocking member disposed on the substrate and configured to block at least part of the deposition material emitted from the deposition source, wherein an opening is defined on at least one side of the blocking member.
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