首页> 外国专利> THIN FILM DEPOSITION APPARATUS, ORGANIC LIGHT-EMITTING DISPLAY MANUFACTURED BY USING THIN FILM DEPOSITION APPARATUS, AND METHOD OF MANUFACTURING THE ORGANIC LIGHT-EMITTING DISPLAY

THIN FILM DEPOSITION APPARATUS, ORGANIC LIGHT-EMITTING DISPLAY MANUFACTURED BY USING THIN FILM DEPOSITION APPARATUS, AND METHOD OF MANUFACTURING THE ORGANIC LIGHT-EMITTING DISPLAY

机译:薄膜沉积设备,通过使用薄膜沉积设备制造的有机发光显示器以及制造有机发光显示器的方法

摘要

A thin film deposition apparatus, which has high external light transmittance and a cathode having a uniform thickness, is disclosed. In one embodiment, the thin film deposition apparatus includes a deposition source spaced apart from a center of the substrate and configured to emit a deposition material toward the substrate and a blocking member disposed on the substrate and configured to block at least part of the deposition material emitted from the deposition source, wherein an opening is defined on at least one side of the blocking member.
机译:公开了一种具有高外部透光率和具有均匀厚度的阴极的薄膜沉积设备。在一实施例中,薄膜沉积设备包括:沉积源,其与基板的中心间隔开并且被配置成向基板发射沉积材料;以及阻挡构件,其被布置在基板上并且被配置成阻挡至少一部分沉积材料。从沉积源发出的光,其中在阻挡构件的至少一侧上限定有开口。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号