Method for robust statistical semiconductor device modeling

摘要

According to one exemplary embodiment, a method for robust statistical semiconductor device modeling includes building a semiconductor device model using at least one new device parameter variation, constructing a variation library for the semiconductor device model, and verifying the variation library against measured data from physical semiconductor devices. The variation library is constructed by determining variations of the at least one new device parameter variation and standard device parameters as functions of, for example. sizes and locations of semiconductor devices on semiconductor dies.