首页>
外国专利>
Impurity introducing apparatus having feedback mechanism using optical characteristics of impurity introducing region
Impurity introducing apparatus having feedback mechanism using optical characteristics of impurity introducing region
展开▼
机译:具有使用杂质引入区域的光学特性的反馈机制的杂质引入装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
An impurity doping system is disclosed, which includes an impurity doping device for doping an impurity into a surface of a solid state base body, a measuring device for measuring an optical characteristic of an area into which the impurity is doped, and an annealing device for annealing the area into which the impurity is doped. The impurity doping system realizes an impurity doping not to bring about a rise of a substrate temperature, and measures optically physical properties of a lattice defect generated by the impurity doping step to control such that subsequent steps are optimized.
展开▼