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Electrostatic comb-drive micromechanical actuator

机译:静电梳齿驱动微机械执行器

摘要

The invention relates to a micromechanical actuator, especially a micro-mirror scanner, comprising an actuator unit in an outer frame which unit is suspended in the outer frame via two torsion elements, and electrostatic tilt drives from intermeshing first and second comb-type electrodes which are off-set from each other vertically. The first electrodes are rigidly connected to the outer frame and the second electrodes to the outer frame via an outer connecting element and to the actuator unit via an inner connecting element. The inner connecting element has a spring which extends in parallel to the outer tilting axis, which is connected to the same in a section of the actuator unit close the outer tilting axis, and which is designed and arranged to be rigid in the vertical direction and flexible at a right angle to the vertical direction. The micromechanical actuator according to the invention allows the use in a micro-mirror scanner whose slow axis is non-resonantly driven with excursions of +/−7°, lateral mirror sizes having dimensions of 1 mm and more and a resonant frequency of 1 kHz and can be integrated even into flat mobile phones.
机译:本发明涉及一种微机械致动器,特别是一种微镜扫描器,其包括在外框架中的致动器单元,该致动器单元经由两个扭转元件悬挂在外框架中,并且由相互啮合的第一和第二梳型电极静电倾斜驱动。彼此垂直偏移。第一电极通过外部连接元件刚性地连接到外部框架,第二电极通过内部连接元件牢固地连接到致动器单元。内部连接元件具有平行于外部倾斜轴线延伸的弹簧,该弹簧在致动器单元的封闭外部倾斜轴线的部分中与该外部倾斜轴线连接,并且被设计和布置成在竖直方向上是刚性的并且与垂直方向成直角的柔性。根据本发明的微机械致动器允许用于微镜扫描仪,该微镜扫描仪的慢轴以> +/- 7°的偏移非共振地驱动,侧向镜尺寸的尺寸为1mm以上且共振频率为> 1mm。 1 kHz,甚至可以集成到平板手机中。

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