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Method to create arbitrary sidewall geometries in 3-dimensions using liga with a stochastic optimization framework
Method to create arbitrary sidewall geometries in 3-dimensions using liga with a stochastic optimization framework
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机译:使用Liga和随机优化框架在3维中创建任意侧壁几何的方法
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摘要
Disclosed herein is a method of making a three dimensional mold comprising the steps of providing a mold substrate; exposing the substrate with an electromagnetic radiation source for a period of time sufficient to render the portion of the mold substrate susceptible to a developer to produce a modified mold substrate; and developing the modified mold with one or more developing reagents to remove the portion of the mold substrate rendered susceptible to the developer from the mold substrate, to produce the mold having a desired mold shape, wherein the electromagnetic radiation source has a fixed position, and wherein during the exposing step, the mold substrate is manipulated according to a manipulation algorithm in one or more dimensions relative to the electromagnetic radiation source; and wherein the manipulation algorithm is determined using stochastic optimization computations.
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