Autonomous adaptive system and method for improving semiconductor manufacturing quality

摘要

An autonomous biologically based learning tool system and a method that the tool system employs for learning and analysis are provided. The autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats the data, and (c) an autonomous learning system based on biological principles of learning. The autonomous learning system comprises a memory platform and a processing platform that communicate through a network. The network receives data from the tool system and from an external actor through the interaction manager. Both the memory platform and the processing platform include functional components and memories that can be defined recursively. Similarly, the one or more tools can be deployed recursively, in a bottom-up manner in which an individual autonomous tools is assembled in conjunction with other (disparate or alike) autonomous tools to form an autonomous group tool, which in turn can be assembled with other group tools to form a conglomerated autonomous tool system. Knowledge generated and accumulated in the autonomous learning system(s) associated with individual, group and conglomerated tools can be cast into semantic networks that can be employed for learning and driving tool goals based on context.