机译:半导体制造系统中基于改进的自适应网络模糊推理系统(ANFIS)的瓶颈预测方法%半导体制造系统中基于改进的基于自适应网络模糊推理系统(ANFIS)的瓶颈预测方法
College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China Key Laboratory of Measurement and Control of Complex Systems of Engineering, Ministry of Education, Southeast University, Nanjing 210096, China;
College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China;
Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China;
State Key Laboratory of Computer Science, Institute of S ottware, Chinese Academy of Sciences, Beijing 100190, China;
自适应网络模糊推理系统; 半导体制造系统; ANFIS; 预测精度; 离散事件动态系统; 基础; 循环时间; 数值输入;