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Silicide thermal heaters for silicon-on-insulator nanophotonic devices
Silicide thermal heaters for silicon-on-insulator nanophotonic devices
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机译:绝缘体上硅纳米光子器件的硅化物热加热器
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摘要
A thermally switched Silicon-On-Insulator (SOI) photo electronic device includes a silicon layer including an optical waveguide and a silicide heating element horizontally adjacent to the waveguide. The waveguide has a refractive index that changes with heat applied to the waveguide.
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