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Method of preventing generation of arc during rapid annealing by joule heating
Method of preventing generation of arc during rapid annealing by joule heating
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机译:通过焦耳加热防止在快速退火期间产生电弧的方法
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摘要
Disclosed herein is a rapid annealing method in a mixed structure composed of a heat treatment-requiring material, dielectric layer and conductive layer, comprising that during rapid annealing on a predetermined part of the heat treatment-requiring material, by instantaneously generated intense heat due to Joule heating by application of an electric field to the conductive layer, the potential difference between the heat treatment-requiring material and the conductive layer is set lower than the dielectric break-down voltage of the dielectric layer, thereby preventing generation of arc by dielectric breakdown of the dielectric layer during the annealing.
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