Method of Preventing Generation of Arc During Rapid Annealing by Joule Heating

摘要

The present invention when the rapid heat treatment the areas desired for the material that requires the heat treatment at a high temperature generated momentarily by an electric field to the conductive layer in a mixed structure of a material, the insulating layer and the conductive layer that requires a heat treatment is applied by Joule heating , to a rapid thermal annealing method that a potential difference of the material and the conductive layer that requires the heat treatment to prevent the arc (arc) occurs due to dielectric breakdown of the insulating layer of the heat treatment by setting to be lower than the breakdown voltage of the insulating layer .