首页> 外国专利> Method and apparatus for acquiring physical information, method for manufacturing semiconductor device including array of a plurality of unit components for detecting physical quantity distribution, light-receiving device and manufacturing method therefor, and solid-state imaging device and manufacturing method therefor

Method and apparatus for acquiring physical information, method for manufacturing semiconductor device including array of a plurality of unit components for detecting physical quantity distribution, light-receiving device and manufacturing method therefor, and solid-state imaging device and manufacturing method therefor

机译:获取物理信息的方法和设备,包括用于检测物理量分布的多个单元组件的阵列的半导体器件的制造方法,光接收器件及其制造方法,以及固态成像器件及其制造方法

摘要

Method and apparatus for acquiring physical information, method for manufacturing semiconductor device including array of a plurality of unit components for detecting physical quantity distribution, light-receiving device and manufacturing method therefor, and solid-state imaging device and manufacturing method therefore are provided. The method for acquiring physical information uses a device for detecting a physical distribution, the device including a detecting part for detecting an electromagnetic wave and a unit signal generating part for generating a corresponding unit signal on the basis of the quantity of the detected electromagnetic wave. The detecting part includes a stacked member having a structure in which a plurality of layers having different refractive indexes between the adjacent ones and each having a predetermined thickness is stacked, the stacked member being provided on the incident surface side to which the electromagnetic wave is incident and having the characteristic that a predetermined wavelength region component of the electromagnetic wave is reflected, and the remainder is transmitted.
机译:提供了一种用于获取物理信息的方法和设备,用于制造包括多个用于检测物理量分布的单元部件的阵列的半导体器件的方法,光接收器件及其制造方法,以及固态成像器件及其制造方法。用于获取物理信息的方法使用用于检测物理分布的设备,该设备包括用于检测电磁波的检测部分和用于基于检测到的电磁波的量生成相应的单位信号的单位信号生成部分。检测部包括堆叠构件,该堆叠构件具有以下结构:在该堆叠构件中,在相邻层之间具有不同的折射率并且具有预定厚度的多个层被堆叠,该堆叠构件设置在电磁波入射到的入射表面侧。并且具有反射电磁波的预定波长区域分量,并透射其余部分的特征。

著录项

  • 公开/公告号US8101901B2

    专利类型

  • 公开/公告日2012-01-24

    原文格式PDF

  • 申请/专利权人 ATSUSHI TODA;

    申请/专利号US20080200445

  • 发明设计人 ATSUSHI TODA;

    申请日2008-08-28

  • 分类号H01L31/0312;H01L31/0232;H01L31/18;

  • 国家 US

  • 入库时间 2022-08-21 17:26:34

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